Imaging at atomic resolution based on the inelastic scattering of fast electrons has become firmly established in the last three decades. In this lecture we discuss the modelling of this inelastic scattering. The quantum excitation of phonons model for phonon scattering will be described and its use illustrated in quantitative Z-contrast imaging and also in understanding atomic resolution low-loss imaging using electrons scattered through smaller angles.
Inelastic scattering based on ionization by the probing electrons finds application in electron energy-loss spectroscopy and energy dispersive x-ray analysis. Examples of these modes of imaging will be discussed and the role of phonon excitation elucidated.
Theoretical aspects of low-loss vibrational spectroscopy may also be discussed.