A Zeiss Gemini 2 Merlin FESEM was installed at the CSIRO Manufacturing Business Unit at the Clayton site late last year and was the first of its kind to be installed in Australia. This particular SEM comes with various imaging modes:
A High efficiency Everhart-Thorley type SE detector;
An In-Lens SE and BSE detector;
A four quadrant angular selective solid state BSE detector; and,
A STEM detector.
There are also different types of imaging modes that can be used:
High Resolution
Depth of Field
Analytical
Fisheye (additional license required)
The aim of this presentation is to demonstrate how the different detectors (SE and In-Lens) and imaging modes (High resolution and Depth of Field) can have an effect on the image quality using a wide variety of samples at accelerating voltages ranging from 200 V to 5 kV. Beam currents ranging from 6 pA in the Depth of Field mode at 200 V to 185 pA in the High Resolution mode at 5 kV will also be compared.